ACM Research Ships First Three-Station PECVD SiCN Tool, Sees Q1 Revenue Up 31%–33%

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ACM Research shipped its first three-station PECVD SiCN system for 55 nm BEOL and advanced packaging. The company forecasts Q1 2026 unaudited revenue of $225 M–$230 M (31%–33% growth) and shipments of $233 M–$238 M (49%–52%), reaffirming a $1.08 B–$1.175 B full-year outlook.

1. First PECVD SiCN System Shipment

ACM shipped its first three-station PECVD silicon carbonitride system to a leading semiconductor manufacturer after meeting process specifications in its Lingang lab. The rotating deposition architecture divides film delivery across three stations, each with independent RF control, enabling tighter interface layer control and high uniformity for 300 mm wafers at temperatures up to 400 °C.

2. Preliminary Q1 2026 Revenue and Shipments

ACM expects unaudited Q1 2026 revenue of $225 M–$230 M, a year-over-year increase of 31%–33%, and total shipments of $233 M–$238 M, up 49%–52% year-over-year. The company reaffirmed its full-year 2026 revenue target of $1.08 B–$1.175 B and will discuss results on its May 7 earnings call.

Sources

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