Axcelis to Showcase MUSIC™ Technique and Boron Doping Analysis at ASMC
ACLS•Axcelis will present its patented MUSIC™ Multiple Steps Implant Chain technique at ASMC 2026 in Albany from May 11-14, highlighting defect reduction and throughput gains on SiC MOSFET implants. The company will also coauthor resistance performance analysis of high-dose boron doping and sponsor ASMC’s opening reception and WiS panel discussion.
1. ASMC 2026 Participation
Axcelis will join the Advanced Semiconductor Manufacturing Conference May 11-14 in Albany to address manufacturing challenges and network with industry leaders. The event gathers equipment suppliers, manufacturers and academia for technical exchange and strategy development.
2. Technical Presentations
On May 13, Axcelis technologists will co-present two studies in the Equipment Optimization session: MUSIC™ for reduced defects and improved SiC MOSFET throughput, and an analysis of high-dose boron doping resistance performance.
3. Sponsorship and WiS Panel
Axcelis is sponsoring ASMC’s opening reception and the collocated Women in Semiconductors Conference on May 14, featuring a panel, "Empowerment in Action," with Data Scientist Julia Okvath to discuss women’s strategies for success.
4. Strategic Implications
CEO Russell Low highlighted MUSIC™’s ability to run multiple implant recipes sequentially, boosting throughput and cutting cost per wafer, underscoring Axcelis’s focus on productivity gains and competitive positioning in ion implantation.
