Xanadu expands Mitsubishi Chemical collaboration on quantum EUV lithography simulations under Canada-Japan support

The work is backed by Canada’s NRC IRAP program, which has provided Xanadu advisory services and more than $800,000 in prior funding.

Japan support comes from the Strategic Innovation Promotion Program led by AIST, including G-QuAT, to scale the partners’ earlier EUV modeling results.

The planned outcome is an FTQC-ready software pipeline to identify resist materials that reduce blurring for next-generation chip manufacturing.

Xanadu Quantum Technologies entered a new phase of collaboration with Mitsubishi Chemical on quantum-driven semiconductor fabrication research focused on EUV lithography.

The project targets radiation-induced blur in EUV photoresists, aiming to integrate quantum simulation outputs into Mitsubishi’s multiscale models to predict blur.